| 000 | 00490cam a22001937a 4500 | ||
|---|---|---|---|
| 001 | 007382 | ||
| 003 | armpuni | ||
| 005 | 20160923161507.0 | ||
| 008 | 160923s1987####xx#a##########000#0#und#d | ||
| 040 |
_aarmpuni _carmpuni |
||
| 041 | _aen | ||
| 080 | _a621.382.049 | ||
| 100 | 1 | _aRuska, Walter E. W. | |
| 245 | 1 | 0 |
_aMicroelectronic processing / _cWalter E. W. Ruska |
| 260 |
_aNew York : _bMcGraw Hill, _c1987 |
||
| 300 | _a417 p.;, 24 cm. | ||
| 942 |
_cLB _2cdu |
||
| 945 |
_ajmr _d2016-09-30 |
||
| 999 |
_c7381 _d8556 |
||